An Active Visible-Light Integrated Photonics Platform on 200-mm Si

Wesley D. Sacher; Yiding Lin; Hong Chen; Saeed S. Azadeh; Zheng Yong; Zheng Yong; Xianshu Luo; Hongyao Chua; Jason C. C. Mak; Alperen Govdeli; Alperen Govdeli; Ankita Sharma; Ankita Sharma; Jared C. Mikkelsen; Xin Mu; Xin Mu; Andrei Stalmashonak; Guo-Qiang Lo; Joyce K. S. Poon; Joyce K. S. Poon

doi:10.1364/OFC.2023.Tu3C.5

Optical Fiber Communication Conference (OFC) 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper Tu3C.5
•https://doi.org/10.1364/OFC.2023.Tu3C.5

An Active Visible-Light Integrated Photonics Platform on 200-mm Si

Wesley D. Sacher, Yiding Lin, Hong Chen, Saeed S. Azadeh, Zheng Yong, Xianshu Luo, Hongyao Chua, Jason C. C. Mak, Alperen Govdeli, Ankita Sharma, Jared C. Mikkelsen, Xin Mu, Andrei Stalmashonak, Guo-Qiang Lo, and Joyce K. S. Poon

Optical Fiber Communication Conference 2023

San Diego California United States
5–9 March 2023
ISBN: 978-1-957171-18-0

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New Materials and Technologies (Tu3C)

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W. D. Sacher, Y. Lin, H. Chen, S. S. Azadeh, Z. Yong, X. Luo, H. Chua, J. C. C. Mak, A. Govdeli, A. Sharma, J. C. Mikkelsen, X. Mu, A. Stalmashonak, G. Lo, and J. K. S. Poon, "An Active Visible-Light Integrated Photonics Platform on 200-mm Si," in Optical Fiber Communication Conference (OFC) 2023, Technical Digest Series (Optica Publishing Group, 2023), paper Tu3C.5.

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Abstract

We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445–640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.

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