Abstract
Numerous techniques exist for measuring the microtopography of precision surfaces. This paper describes an instrument that measures the microprofile of a surface using differential interference microscopy. The vertical resolution of the instrument is approximately 5 Angstroms and its lateral resolution is diffraction limited. The instrument can produce surface profiles of up to 100 millimeters in length in less than 2 minutes.
© 1984 Optical Society of America
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