Abstract
To improve the resolution of grazing incidence XUV devices precise evaluation of the broadening parameters of the Line Spread Function are required. In this respect, transverse ray aberrations must be first evaluated for an oblique exit pupi1-aperture stop not centered al the grating pole-geometrical optical criterion clearly shows then the competitive action of the defect of focus vs astigmatism and astigmatic coma.
© 1986 Optical Society of America
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