Abstract
This paper describes null interferometry at 1nm accuracy for testing aspherical surfaces of sub-mm deviation from the best fitting sphere. We have developed the two kinds of null compensators. The one is a “null lens” composed of almost perfect spherical surfaces and homogeneous glass. The other is a “zone plate” manufactured through the lithography process. The results of the two null testing were compared with the results by the ultra-precision CMM (Coordinate Measuring Machine). These totally different measurements differed only by an amount of 1.6nm rms. This result shows the accuracy of our null interferometry is almost 1nm rms.
© 2002 Optical Society of America
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