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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OWA3
  • https://doi.org/10.1364/OFT.2008.OWA3

Calibration Limits for Interferometric Measurements

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Abstract

This paper presents how to quantify the measurement noises in optical surface testing. We also discussed how to apply a smoothing filter in map registration and subtraction.

© 2008 Optical Society of America

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