Lateral resolution and instrument transfer function as criteria for selecting surface metrology instruments

Xavier Colonna de Lega; Peter J. de Groot

doi:10.1364/OFT.2012.OTu1D.4

Imaging and Applied Optics Technical Papers
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper OTu1D.4
•https://doi.org/10.1364/OFT.2012.OTu1D.4

Lateral resolution and instrument transfer function as criteria for selecting surface metrology instruments

Xavier Colonna de Lega and Peter J. de Groot

Optical Fabrication and Testing 2012

Monterey, California United States
24–28 June 2012
ISBN: 1-55752-947-7

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Optical Testing I (OTu1D)

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X. C. de Lega and P. J. de Groot, "Lateral resolution and instrument transfer function as criteria for selecting surface metrology instruments," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper OTu1D.4.

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Abstract

We review definitions of optical resolution and how they relate to the Instrument Transfer Function of surface profiling interferometers. The corresponding optical cutoff provides a selection criterion for a given metrology application (PSD, waviness).

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