Abstract

As a summary of the authors’ previous paper of Ref 1, we describe a new concept of angle-resolved spectral reflectometry with a pixelated polarizing camera for real-time measurement of multilayer thin-film thickness. Our proposed method can measure the changes in the phase and amplitude of p- and s-polarized light over a broad spectral range and a wide incident angle at a time. We verified our technique by measuring a sample of multilayer thin-film and comparing our measurement results with an ellipsometer.

© 2023 The Author(s)