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Conferences > OFT > 2023 > JTu4A > JTu4A.9
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper JTu4A.9

Fabrication of large area membrane based binary photon sieves

Kevin L. Denis, Adrian Daw, Ron Hu, Meng-Ping Chang, Jacob Parker, Kelly Johnson, and Douglas Rabin

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Abstract

In this paper we describe the fabrication of a micromachined silicon membrane based photon sieve designed for extreme ultra-violet solar imaging in support of the VIrtual Super-resolution Optics with Reconfigurable Swarms (VISORS) mission.

© 2023 The Author(s)

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