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Conferences > OFT > 2023 > OTh2B > OTh2B.6
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper OTh2B.6

Research on the measurement of high aspect ratio groove by near-infrared microscopic interferometry with aberration compensation

Jianqiu Ma, Zhishan Gao, Qun Yuan, Chunxia Wu, and Xiao Huo

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Abstract

We propose a near-infrared microscopic interferometry with aberration compensation for improving the bottom imaging and interference signals of the high aspect ratio (HAR) groove, to measure the surface profile of HAR microstructures.

© 2023 The Author(s)

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