Active Compensation of Wavefront Error for Extreme-large-aperture Flat Interferometer

Ningyan Xu; Qun Yuan; Zhenyan Guo; Dan Zhu; Weijian Liu; Zhishan Gao

Optica Design and Fabrication Congress 2023 (IODC, OFT)
Technical Digest Series (Optica Publishing Group, 2023),
paper OW2B.7

Active Compensation of Wavefront Error for Extreme-large-aperture Flat Interferometer

Ningyan Xu, Qun Yuan, Zhenyan Guo, Dan Zhu, Weijian Liu, and Zhishan Gao

Optical Fabrication and Testing 2023

Québec City, Québec Canada
4–8 June 2023
ISBN: 978-1-957171-22-7

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Advanced Metrology Systems I (OW2B)

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N. Xu, Q. Yuan, Z. Guo, D. Zhu, W. Liu, and Z. Gao, "Active Compensation of Wavefront Error for Extreme-large-aperture Flat Interferometer," in Optica Design and Fabrication Congress 2023 (IODC, OFT), Technical Digest Series (Optica Publishing Group, 2023), paper OW2B.7.

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Abstract

We propose an active compensation method using deformation mirror for systematic error introduced by collimation lens in extreme-large-aperture flat interferometer, based on the matrix optics principle, to improve the measuring accuracy.

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