Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 1988 > TuA > TuA13

Computational Studies of Status Profilometer Characteristics

S.R. Wilson, G.A. Al-Jumaily, and J.R. McNeil

Not Accessible

Your library or personal account may give you access

Abstract

Stylus surface profiling instruments have found application in the characterization of microroughness. Al-Jumaily [1] has compared data obtained using a stylus profilometer and an optical scatterometer to characterize a metal surface. The stylus profilometer data was found to be inconsistent with the optical data. In resolving the discrepancy, the "transfer functions" of the instruments were identified as the source of the disagreement.

© 1988 Optical Society of America

PDF Article
More Like This
Comparison of Optical Scatterometer and Optical Profilometer Techniques for Microstructure Characterization of Optical Surfaces

R.D. Jacobson, S.R. Wilson, G.A. Al-Jumaily, and J.R. McNeil
TuA15 Optical Interference Coatings (OIC) 1988

High Precision Optical Profilometer Using the Differential Method

H. Miki, N. Suzuki, M. Adachi, Y. Nakai, and I. Kawaguchi
ThA3 Optical Fabrication and Testing (OF&T) 1988

Fabrication of an Optical Heterodyne Profilometer

M. C. George, H. Jagannath, B. R. Reddy, Gerard M. Perera, and Putcha Venkateswarlu
ThA5 Optical Fabrication and Testing (OF&T) 1988

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use