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Conferences > OIC > 1992 > OThA > OThA11

Improvements in mirror quality of reflective spatial light modulators using dielectric coatings and mechanical polishing

A. O’Hara, J.R. Hannah, R.J. Holwill, I. Underwood, and D. G. Vass

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Abstract

The objective of this work is to improve the optical performance of mirrors on silicon backplane spatial light modulators (SLM). Currently this is done in two stages. The first improvement is achieved through the deposition of a protective coating applied at an appropriate stage in the microfabrication process sequence. Further enhancement is achieved by adding a novel processing stage involving wafer polishing.

© 1992 Optical Society of America

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