Abstract
The purpose of our work is to observe the optical energy gap shift for amorphous thin films of cerium oxide produced by addition of CF4 to Ar and O2 gas mixture during rf sputtering of Ce target. It has been expected that the refractive index of cerium oxyfluoride in thin film form decreases as the CF4 concentration increases. Such bandgap- and index- controllable coating materials may be useful for both energy efficiency and optical multilayer devices.
© 1992 Optical Society of America
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