Abstract
When investigating the surface morphology of thin films and substrates the following problems have to be taken into account:
- The microtopography as a two-dimensional roughness profile consists of various structural features the form, size, and distribution of which depend on the substrate and film material, polishing process, deposition procedure, and environmental conditions.
- Anisotropy and local variations of the roughness profile are likely to occur.
- The characterization techniques should be applicable to quite a large variety of different surface structures such as superpolished substrates, columnar film morphology, corroded surfaces with pronounced roughness etc.
- All techniques of surface roughness measurement are subject to bandwidth limitation. Hence, the information available depends on both the method applied and the particular properties of the sample.
© 1995 Optical Society of America
PDF ArticleMore Like This
Angela Duparré, Horst Truckenbrodt, and Friedrich Scheerer
WA6 Optical Interference Coatings (OIC) 1995
E. Masetti, D. Ristau, A. Duparré, N. Kaiser, and F. Flory
ThA12 Optical Interference Coatings (OIC) 1995
Florence Armani-Leplingard, David K. Fork, and John J. Kingston
SD1 Advanced Solid State Lasers (ASSL) 1995