Abstract
Light scattering from random continuous profiles is rather well understood today and can be predicted with high accuracy1,2. However, for high-quality coatings produced on super smooth substrates (< 0.2 nm roughness), pratically the whole scattering originates from a few localized defects in the stacks. Such discrete irregularities can be detected by the presence of a “ripple” in the angular scattering3 measured with high resolution (0.01°). Therefore the characterization tools must be improved in order to reach the size, refractive index and density of localized defects that still play a key role for many applications4 such as laser damage.
© 1995 Optical Society of America
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