Abstract
Coated optical components with demanding spectral performance specifications have been manufactured at CSIRO. A number of these components also required a surface figure below λ\100 peak-to-valley and surface variation of λ\1600 rms over 75mm diameter for the completed coated optics. Multi-wavelength ellipsometry combined with spectrophotometry enabled us to meet targeted performance.
© 2001 Optical Society of America
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