Spectral Polarimetry Technique as a Complementary Tool to Ellipsometry of Dielectric Films

Marcelo B. Pereira; Bruno J. Barreto; Flavio Horowitz

doi:10.1364/OIC.2010.ThE7

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper ThE7
•https://doi.org/10.1364/OIC.2010.ThE7

Spectral Polarimetry Technique as a Complementary Tool to Ellipsometry of Dielectric Films

Marcelo B. Pereira, Bruno J. Barreto, and Flavio Horowitz

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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Measurement III (ThE)

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M. B. Pereira, B. J. Barreto, and F. Horowitz, "Spectral Polarimetry Technique as a Complementary Tool to Ellipsometry of Dielectric Films," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper ThE7.

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Abstract

A Method using Spectral Polarimetry is proposed to prevent multiple solutions in Ellipsometry by providing film dispersion curves independently of physical thicknesses. Validity of the Method is tested with a single-solution, very thin TiO₂ coating.

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