Abstract
The cut-off and layer thickness accuracy of single layers is discussed. Error compensation effects of complex multilayer systems are investigated with computer simulated process runs and confirmed by practical coating experiments.
© 2013 Optical Society of America
PDF ArticleMore Like This
Kai Wu, Sheng-Hui Chen, Ming-Sheng Chang, and Cheng-Chung Lee
WC6 Optical Interference Coatings (OIC) 2007
Bruno Badoil, Fabien Lemarchand, Michel Cathelinaud, and Michel Lequime
WC5 Optical Interference Coatings (OIC) 2007
Alfons Zoeller, Michael Boos, Harro Hagedorn, A. Kobiak, H. Reus, and B. Romanov
WC3 Optical Interference Coatings (OIC) 2007