Innovative Sputter System for High Volume Production of Demanding Optical Interference Coatings

S. Schwyn Thöny; M. Chesaux; S. Gees; A. Frigg

doi:10.1364/OIC.2016.WA.7

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper WA.7
•https://doi.org/10.1364/OIC.2016.WA.7

Innovative Sputter System for High Volume Production of Demanding Optical Interference Coatings

S. Schwyn Thöny, M. Chesaux, S. Gees, and A. Frigg

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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Deposition I - Sputtering and IAD (WA)

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S. Schwyn Thöny, M. Chesaux, S. Gees, and A. Frigg, "Innovative Sputter System for High Volume Production of Demanding Optical Interference Coatings," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper WA.7.

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Abstract

We show a sputter system with an innovative combination of components which enables low cost of ownership, high volume and high yield production of demanding optical interference filters on thin glass wafers.

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