Abstract
We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.
© 2019 The Author(s)
PDF ArticleMore Like This
Mariana Fazio, Le Yang, Gabriele Vajente, Alena Ananyeva, and Carmen S. Menoni
FM5E.5 Frontiers in Optics (FiO) 2020
L. Yang, E. Randel, G. Vajente, A. Ananyeva, E. Gustafson, A. Markosyan, R. Bassiri, M. Fejer, and C. S. Menoni
FA.6 Optical Interference Coatings (OIC) 2019
Michele Magnozzi, Alex Amato, Nikita Shcheblanov, Anaël Lemaître, Gianpietro Cagnoli, Massimo Granata, Christophe Michel, Gianluca Gemme, Laurent Pinard, and Maurizio Canepa
WB.7 Optical Interference Coatings (OIC) 2022