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Thermal and temporal stability of nitridated Ru/B4C multilayer for high flux monochromator application

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Abstract

Nitridated Ru/B4C multilayers for hard X-ray monochromator were fabricated and annealed to analyze the thermal stability. The results show that the nitridated multilayer remains stable up to 300 °C and no structure changes were observed in 2 years.

© 2019 The Author(s)

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