Abstract
The effect of annealing on the X-ray optical characteristics of artificial multilayer structures composed of metal (Cr,Fe,Ni,Mo,Rh, W,Pt and others) and carbon is studied. To analyze the changes at annealing a small-angle X-ray diffraction was used. The observed X-ray reflectivity enhancement can be explained by the uphill diffusion of metal atoms.
© 1992 Optical Society of America
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