Abstract
Molybdenum-silicon multilayer soft x-ray mirrors have been fabricated using a magnetron sputtering system. Their structures have been characterized by x-ray diffraction (XRD) and reflectivities at normal incidence have been measured by using monochromatized synchrotron radiation in the 18-24 nm region. A normal incidence reflectivity as high as 40% at 20.8 nm was achieved.
© 1994 Optical Society of America
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