T. Lizotte, O. P. Ohar, and R. Rosenberg, "Developments in Beam Shaping Applications Using Diffractive Optics for Mircoelectronics Manufacturing,"
in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications, Systems and Technologies,
Technical Digest (CD)
(Optica Publishing Group, 2005), paper PWE3.