Abstract
Recent experiments in submicron optical lithography used a sodium atomic beam propagating in the direction and cooled along the direction to write a permanent, periodic, submicron grating in the direction on a silicon substrate by lensing the atomic beam with an optical standing-wave field in the direction.1 The width of the diffraction peaks have not yet been measured. In this paper, we show that a semiclassical force2 simulation without diffusion predicts a width of ≈100 Å, or 2% of λ, the wavelength of the optical standing-wave field (see Fig. 1).
© 1992 Optical Society of America
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