Abstract
The surface selectivity of surface second harmonic generation (SSHG) in centro- symmetric materials makes it a very powerful tool for studying surfaces.1 The Si-SiO2 interface is of particular interest because of its critical role in integrated circuits. SSHG has been used to study surface steps,2 straining of subsurface bonds,3 and surface roughness.4 Early experiments using nanosecond pulses were actually limited by the laser-induced damage to the surfaces, which has resulted in the use of ps3 and 100 fs2,4 pulses to obtain good signal to noise with lower average powers (~1 W for 100-fs pulses).
© 1996 Optical Society of America
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