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Optica Publishing Group
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper QTuD2

Quantum Entanglement for Optical Lithography and Microscopy Beyond the Rayleigh Limit

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Abstract

Recently, Boto et al.1 showed that using N entangled photons and an N-photon responsive lithographic recording medium, one could potentially write lithographic gratings with a resolution that is N times better than the classical Rayleigh criterion. An anticipated experimental difficulty is that such beams are weak, yet strong fields are needed to excite the N-photon absorption process. For the case of N = 2, which was described in detail by Boto et al., we propose a method to overcome this problem. We also propose to use this idea “in reverse” to perform microscopy with better resolution than allowed by the Rayleigh limit.

© 2001 Optical Society of America

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