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Conferences > QELS > 2006 > JWD > JWD5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper JWD5

Direct Measurement of Tiled Mirror Phase Difference by Multi-Wave Shearing Interferometry

Soazic Mousset, Claude Rouyer, Gabrielle Marre, Nathalie Blanchot, Sébastien Montant, and Benoit Wattellier

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Abstract

We present a new method based on multi-wave shearing interferometry to measure the relative phase between two independent beams separated by a physical gap. Experimental results show accuracy and sensitivity better than 50nm.

© 2006 Optical Society of America

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