Abstract
We report on a systematic study of native oxide formation in films of NbTiN deposited using a physical vapor deposition process on silicon nitride/silicon dioxide dielectrics, intended for fabrication of silicon quantum photonic integrated circuits.
© 2023 The Author(s)
PDF ArticleMore Like This
Loïc H. Djamen Tchapda, Troy A. Hutchins-Delgado, Sami A. Nazib, Hosuk Lee, Tzu-Ming Lu, John Nogan, Ivan Komissarov, Roman Sobolewski, Arash Mafi, and Marek Osiński
QW3B.2 Quantum 2.0 (QUANTUM) 2022
Troy A. Hutchins-Delgado, Sami A. Nazib, Hosuk Lee, Jarrett L. Smalley, Nathan J. Withers, Avril A. Mesa-Olivo, John Nogan, Ivan Komissarov, Roman Sobolewski, Arash Mafi, and Marek Osiński
QTu8A.2 Quantum 2.0 (QUANTUM) 2020
Alessandro Prencipe, Samuel Gyger, Mohammad A. Baghban, Julien Zichi, Katharina D. Zeuner, Thomas Lettner, Lucas Schweickert, Stephan Steinhauer, Ali W. Elshaari, Katia Gallo, and Val Zwiller
ck_1_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023