Abstract
Surface layers are investigated by means of MAI–MWL (multiple angle of incidence, multiple wavelength) ellipsometry. The "layers" investigated are modifications of optical glasses in the near-surface region, caused by polishing and cleaning processes. The influence of several treatments on different materials is discussed.
The device used is a new, special ellipsometer arrangement using only absolutely nescessary elements but allowing fast and very accurate measurements.
© 1990 Optical Society of America
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