Abstract
The Deformable Mirror Device (DMD) is a micromechanical spatial light modulator that offers both amplitude and/or phase modulation. It is comprised of small mirror elements suspended above silicon addressing circuitry by small hinges attached to support posts. [Ref. 1] The pixel can be made to rotate about its hinge axis by applying a potential difference between the pixel and the addressing electrode. Both area array and linear DMDs have been built and found application in several areas. [Ref. 2, 3, 4]
© 1990 Optical Society of America
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