Abstract
A Bragg microcavity optical sensor is fabricated using Electron-Beam Lithography and Reactive Ion Etching techniques. An index change of 0.03 corresponds to a peak resonance wavelength shift of approximately 1 nm.
© 2011 Optical Society of America
PDF ArticleMore Like This
P. Muellner, R. Bruck, M. Karl, M. Baus, T. Wahlbrink, and R. Hainberger
IMF4 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2011
Aju. S. Jugessur, James Dou, and J. Stewart Aitchison
IWD7 Integrated Photonics and Nanophotonics Research and Applications (IPR) 2009
V. D. Ta, R. Chen, D. M. Nguyen, and H. D. Sun
CE_9_1 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2013