Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > UFO > 2023 > F4 > F4.4

Material-specific imaging at the nanoscale using a 13.5 nm high-harmonic source

Wilhelm Eschen, Chang Liu, Daniel Penagos, Lars Loetgering, Robert Klas, Vittoria Schuster, Alexander Kirsche, Jens Limpert, and Jan Rothhardt

Not Accessible

Your library or personal account may give you access

Abstract

We present a high-harmonic-driven coherent extreme ultraviolet (EUV) microscope operating at 13.5 nm wavelength. Sub-20 nm resolution is demonstrated by utilizing a combination of structured illumination and a highly stable EUV source. We demonstrate the application of nanoscale EUV imaging to a variety of samples from life and material sciences.

© 2023 UFOXIII

PDF Article
More Like This
Material-specific ptychographic imaging at 13.5 nm using a high-order harmonic source

Wilhelm Eschen, Lars Loetgering, Vittoria Schuster, Robert Klas, Alexander Kirsche, Lutz Berthold, Michael Steinert, Thomas Pertsch, Herbert Gross, Michael Krause, Jens Limpert, and Jan Rothhardt
EW6A.5 Compact EUV & X-ray Light Sources (EUVXRAY) 2022

Nanoscale Material-specific Imaging Using an Extreme Ultraviolet Table-top Light Source

Chang Liu, Wilhelm Eschen, Lars Loetgering, Daniel S. Penagos Molina, Robert Klas, Vittoria Schuster, Alexander Kirsche, Lutz Berthold, Alexander Iliou, Michael Steinert, Falk Hillmann, Michael Krause, Thomas Pertsch, Jens Limpert, and Jan Rothhardt
ch_6_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

Multi-purpose high-resolution nanoscale table-top ptychography at 13.5 nm

C. Liu, W. Eschen, L. Loetgering, V. Schuster, R. Klas, A. Kirsche, L. Berthold, A. Iliou, M. Steinert, T. Pertsch, F. Hillmann, M. Krause, J. Limpert, and J. Rothhardt
CF1D.5 Computational Optical Sensing and Imaging (COSI) 2022

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use