Abstract
Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on microelectromechanical systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to .
© 2006 Optical Society of America
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