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Optica Publishing Group Applied Optics Early Posting access

You have attempted to access the full-text of an Early Posting article. Access is available via an institutional subscription.

See the Early Posting FAQ page for additional information.

Compact Auto-aligning Interferometers with Picometer Precision

Applied Optics

Xiang Lin, Peng Qiu, Xiaofang Ren, Yurong Liang, and Hao Yan
received 03/01/2024; accepted 04/14/2024; posted 04/15/2024; Doc. ID 522813
Abstract: This research introduces a compact, auto-aligning interferometer engineered formeasuring translations with a wide angular working range and picometer precision above 1 Hz.It presents a design ensuring automatic beam alignment during movement through secondaryreflection from a corner reflector. The sensor head, a 20×10×10 mm3all-glass, quasi-monolithicstructure, exhibits a displacement sensitivity below 1 pm/Hz1/2above 1 Hz and a wide angularworking range of ±200 mrad. This versatile optical design holds promise to improve thesensitivity in applications such as laser ranging, optical seismometers, precision manufacturingand metrology.

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