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Abstract
In this paper, we have developed a 2D optical scanning module comprising cascaded 3D-printed one-axis rotating mirrors with large areas (${30} \times {30}\;{{\rm mm}^2}$ for the X-direction scan and ${60} \times {25}\;{{\rm mm}^2}$ for the Y-direction scan). Each mirror device contains a square or rectangular silicon substrate coated with aluminum, serving as the mirror. A 3D-printed structure, including the mirror frame (with four embedded mini permanent magnets on the backside), torsion springs, and base, is combined with the mirror; two electromagnets are situated under the mirror as the actuation mechanism. We apply DC voltage to the electromagnets to create magnetic force. The electromagnets can interact with the permanent magnets to make the mirror rotate. The X scan of the 2D scanning module can achieve a static optical scan angle of ${\sim}{11.8}\;\deg$ at the -X corners, and the corresponding Y-scan angle is ${\sim}{4.5}\;\deg$, both with 12 VDC. Moreover, we have observed a fan-shaped distortion, a phenomenon not thoroughly studied previously for combining two single-axis scan mirrors. Therefore, we also perform a simulation to establish and demonstrate a correlation between the simulation prediction and experimental results. The 2D scanning module can be a low-cost alternative to the expensive conventional galvanometer scanners, and it can be used to upgrade a rangefinder to a simplified LiDAR.
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