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Stably polarized 795 nm Vertical-Cavity Surface-Emitting Lasers with Anti-phase SiNx Surface Gratings
Applied Optics- received 03/27/2024; accepted 04/17/2024; posted 04/18/2024; Doc. ID 524882
- Abstract: 795 nm vertical-cavity surface-emitting lasers (VCSELs) with dielectric surface gratings to control the output polarizationare designed and fabricated. The calculated results demonstrate that a well-designed SiNx surface grating positioned onthe surface of an anti-phase VCSEL structure enhances the reflectivity difference between the two polarization modescompared to a conventional GaAs surface grating, consequently resulting in a larger gain anisotropy in VCSELs and a highorthogonal polarization suppression ratio (OPSR). Characterization shows that a peak-to-peak OPSR of 30.3 dB isachieved at 85 °C for 795 nm VCSELs with a SiNx surface grating of 5 μm in diameter and an oxide aperture of ~4 μm,demonstrating the effectiveness of the SiNx surface grating in polarization control for 795 nm VCSELs.