Abstract
This paper describes structurally integrated capacitive sensors that measure the displacement and tilt angles of the movable mount of the lens module of a system for compensating the image-scale variations caused by thermobaric misalignment of a photolithographic projection objective. We present a technique for choosing the optimum design parameters of capacitive sensors, an algorithm for calculating the displacement and tilt angles from the measured capacitance values of the sensors, and a rough calculation of the error and of the measurement for various displacement ranges.
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription