Abstract
A method of rapid monitoring of the degree of surface cleanliness of substrates
intended to form the microrelief of diffraction optical elements is developed in
this article. A method for monitoring the nanoroughness and degree of surface
cleanliness from the dynamic state of a liquid drop has been developed and patented.
The results of experiments on estimating the behavior of a liquid drop, obtained by
means of a high-speed video camera, are presented. The device is used to efficiently
correct the final cleaning process of dielectric substrates.
© 2009 Optical Society of America
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