Abstract

Subject of study. This paper introduces a high-sensitivity on-chip temperature waveguide sensor based on sensitive cladding. Purpose of the work. The operating temperature of the integrated circuit has an important influence on the efficient and stable operation of the circuit system. Therefore, the on-chip temperature sensor plays an important role in the normal use of the integrated circuit chip. Method. By coating the sensor waveguide structure with temperature-sensitive materials, a new hybrid sensor waveguide is formed to increase the sensitivity of the waveguide to temperature changes. The waveguide structure of the sensor adopts a typical all-pass microring resonator as the basic structure of the sensor. The surface of the waveguide is coated with ethanol, which is more sensitive to temperature, to increase the temperature sensitivity of the waveguide structure and realize the improvement of the sensitivity of the temperature sensor. Main results. When the designed radius of the sensor is 3.34 µm and the coating thickness of the temperature-sensitive material cladding is 0.12 µm, the experimental results show that the sensitivity of the sensor reaches 105 pm/°, and it has good linearity. Practical significance. Compared with the currently reported studies on cladding sensors, there are certain improvements and enhancements in terms of sensitivity and sensor size. At the same time, it provides a solution for the research and design of the on-chip temperature sensor.

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