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Ultrafast laser-induced strain waves in thin ruthenium layers

G. de Haan, T. J. van den Hooven, and P. C. M. Planken

Open Access Open Access

Abstract

We report on the time-dependent optical diffraction from ultra-high frequency laser-induced acoustic waves in thin layers of ruthenium deposited on glass substrates. We show that the thermo-optic and strain-optic effects dominate the optical response of Ru layers to a traveling longitudinal strain wave. In addition, we show the generation and detection of acoustic waves with a central frequency ranging from 130 GHz to 750 GHz on ultra-thin layers with thicknesses in the range of 1.2 - 20 nm. For these ultra-thin layers we measure a strong dependency of the speed of sound on the layer thickness and, thus, the frequency. This frequency-dependent speed of sound results in a frequency-dependent acoustic impedance mismatch between the ruthenium and the glass substrate, leading to a faster decay of the measured signals for increasing frequency. Furthermore, for these extremely high-frequency oscillations, we find that the frequency and phase remain constant for times longer than about 2 ps after optical excitation. Back extrapolation of the acquired acoustic signals to t = 0 gives a starting phase of −π/2. As this seems unlikely, we interpret this as an indication of possible dynamic changes in the phase/frequency of the acoustic wave in the first 2 ps after excitation.

© 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2021 (3)

G. de Haan, V. Verrina, A. J. L. Adam, H. Zhang, and P. C. M. Planken, “Plasmonic enhancement of photoacoustic-induced reflection changes,” Appl. Opt. 60(24), 7304–7313 (2021).
[Crossref]

K. Y. Chou, C. L. Wu, C. C. Shen, J. K. Sheu, and C. K. Sun, “Terahertz Photoacoustic Generation Using Ultrathin Nickel Nanofilms,” J. Phys. Chem. C 125(5), 3134–3142 (2021).
[Crossref]

H. Zhang, A. Antoncecchi, S. Edward, P. Planken, and S. Witte, “Ultrafast laser-induced guided elastic waves in a freestanding aluminum membrane,” Phys. Rev. B 103(6), 064303 (2021).
[Crossref]

2020 (9)

N. Medvedev and I. Milov, “Electron-phonon coupling in metals at high electronic temperatures,” Phys. Rev. B 102(6), 064302 (2020).
[Crossref]

P. J. Wang, C. C. Shen, K. Y. Chou, M. H. Ho, J. K. Sheu, and C. K. Sun, “Studying time-dependent contribution of hot-electron versus lattice-induced thermal-expansion response in ultra-Thin Au-nanofilms,” Appl. Phys. Lett. 117(15), 154101 (2020).
[Crossref]

Y. Petrov, K. Migdal, N. Inogamov, V. Khokhlov, D. Ilnitsky, I. Milov, N. Medvedev, V. Lipp, and V. Zhakhovsky, “Ruthenium under ultrafast laser excitation: Model and dataset for equation of state, conductivity, and electron-ion coupling,” Data Br. 28, 104980 (2020).
[Crossref]

H. Zhang, A. Antoncecchi, S. Edward, I. Setija, P. Planken, and S. Witte, “Unravelling phononic, opto-acoustic and mechanical properties of metals with light-driven hypersound,” Phys. Rev. Appl. 10, 1–12 (2020).
[Crossref]

S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte, and P. C. M. Planken, “Detection of Hidden Gratings through Multilayer Nanostructures Using Light and Sound,” Phys. Rev. Appl. 14(1), 014015 (2020).
[Crossref]

S. Edward, H. Zhang, S. Witte, and P. C. M. Planken, “Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness,” Opt. Express 28(16), 23374 (2020).
[Crossref]

V. Verrina, S. Edward, H. Zhang, S. Witte, and P. C. M. Planken, “Photoacoustic detection of low duty cycle gratings through optically opaque layers,” Appl. Phys. Lett. 117(5), 051104 (2020).
[Crossref]

V. Verrina, S. Edward, H. Zhang, A. Antoncecchi, S. Witte, and P. C. M. Planken, “Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures,” Appl. Opt. 59(30), 9499 (2020).
[Crossref]

A. Antoncecchi, H. Zhang, S. Edward, V. Verrina, P. C. M. Planken, and S. Witte, “High-resolution microscopy through optically opaque media using ultrafast photoacoustics,” Opt. Express 28(23), 33937 (2020).
[Crossref]

2018 (2)

2016 (1)

C. Birleanu, M. Pustan, V. Merie, R. Müller, R. Voicu, A. Baracu, and S. Craciun, “Temperature effect on the mechanical properties of gold nano films with different thickness,” IOP Conf. Ser. Mater. Sci. Eng. 147, 012021 (2016).
[Crossref]

2015 (4)

P. J. van Zwol, D. F. Vles, W. P. Voorthuijzen, M. Péter, H. Vermeulen, W. J. van der Zande, J. M. Sturm, R. W. van de Kruijs, and F. Bijkerk, “Emissivity of freestanding membranes with thin metal coatings,” J. Appl. Phys. 118(21), 213107 (2015).
[Crossref]

O. Matsuda, M. C. Larciprete, R. Li Voti, and O. B. Wright, “Fundamentals of picosecond laser ultrasonics,” Ultrasonics 56, 3–20 (2015).
[Crossref]

P. Ruello and V. E. Gusev, “Physical mechanisms of coherent acoustic phonons generation by ultrafast laser action,” Ultrasonics 56, 21–35 (2015).
[Crossref]

A. Haase, V. Soltwisch, F. Scholze, and S. Braun, “Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering,” Proc. SPIE 9628, 962804 (2015).
[Crossref]

2012 (1)

J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, “Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals,” J. Appl. Phys. 111(2), 024902 (2012).
[Crossref]

2010 (1)

2009 (1)

M. R. Armstrong, E. J. Reed, K. Y. Kim, J. H. Glownia, W. M. Howard, E. L. Piner, and J. C. Roberts, “Observation of terahertz radiation coherently generated by acoustic waves,” Nat. Phys. 5(4), 285–288 (2009).
[Crossref]

2008 (1)

J. L. Arlein, S. E. Palaich, B. C. Daly, P. Subramonium, and G. A. Antonelli, “Optical pump-probe measurements of sound velocity and thermal conductivity of hydrogenated amorphous carbon films,” J. Appl. Phys. 104(3), 033508 (2008).
[Crossref]

2007 (2)

J. Wang and C. Guo, “Effect of electron heating on femtosecond laser-induced coherent acoustic phonons in noble metals,” Phys. Rev. B 75(18), 184304 (2007).
[Crossref]

I. Nedelcu, R. W. Van De Kruijs, A. E. Yakshin, and F. Bijkerk, “Temperature-dependent nanocrystal formation in Mo Si multilayers,” Phys. Rev. B 76(24), 245404 (2007).
[Crossref]

2006 (2)

H. Takase, S. Terashima, Y. Gomei, M. Tanabe, Y. Watanabe, T. Aoki, K. Murakami, S. Matsunari, M. Niibe, and Y. Kakutani, “Study of ruthenium-capped multilayer mirror for EUV irradiation durability,” Emerg. Lithogr. Technol. 6151, 615135 (2006).
[Crossref]

R. I. Tobey, M. E. Siemens, M. M. Murnane, H. C. Kapteyn, D. H. Torchinsky, and K. A. Nelson, “Transient grating measurement of surface acoustic waves in thin metal films with extreme ultraviolet radiation,” Appl. Phys. Lett. 89(9), 091108 (2006).
[Crossref]

2005 (2)

A. Devos, R. Cote, G. Caruyer, and A. Lefvre, “A different way of performing picosecond ultrasonic measurements in thin transparent films based on laser-wavelength effects,” Appl. Phys. Lett. 86(21), 211903 (2005).
[Crossref]

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

2004 (3)

B. C. Daly, N. C. Holme, T. Buma, C. Branciard, T. B. Norris, D. M. Tennant, J. A. Taylor, J. E. Bower, and S. Pau, “Imaging nanostructures with coherent phonon pulses,” Appl. Phys. Lett. 84(25), 5180–5182 (2004).
[Crossref]

A. Devos and R. Cote, “Strong oscillations detected by picosecond ultrasonics in silicon: Evidence for an electronic-structure effect,” Phys. Rev. B 70(12), 125208 (2004).
[Crossref]

R. I. Tobey, E. H. Gershgoren, M. E. Siemens, M. M. Murnane, H. C. Kapteyn, T. Feurer, and K. A. Nelson, “Nanoscale photothermal and photoacoustic transients probed with extreme ultraviolet radiation,” Appl. Phys. Lett. 85(4), 564–566 (2004).
[Crossref]

2003 (3)

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750 (2003).
[Crossref]

A. Devos and A. Le Louarn, “Strong effect of interband transitions in the picosecond ultrasonics response of metallic thin films,” Phys. Rev. B 68(4), 045405 (2003).
[Crossref]

T. Saito, O. Matsuda, and O. B. Wright, “Picosecond acoustic phonon pulse generation in nickel and chromium,” Phys. Rev. B 67(20), 205421 (2003).
[Crossref]

2002 (1)

G. A. Antonelli, P. Zannitto, and H. J. Maris, “New method for the generation of surface acoustic waves of high frequency,” Phys. B 316-317, 377–379 (2002).
[Crossref]

2001 (2)

R. M. Slayton, K. A. Nelson, and A. A. Maznev, “Transient grating measurements of film thickness in multilayer metal films,” J. Appl. Phys. 90(9), 4392–4402 (2001).
[Crossref]

A. Devos and C. Lerouge, “Evidence of laser-wavelength effect in picosecond ultrasonics: Possible connection with interband transitions,” Phys. Rev. Lett. 86(12), 2669–2672 (2001).
[Crossref]

2000 (3)

M. Bonn, D. N. Denzler, S. Funk, M. Wolf, S. S. Wellershoff, and J. Hohlfeld, “Ultrafast electron dynamics at metal surfaces: Competition between electron-phonon coupling and hot-electron transport,” Phys. Rev. B 61(2), 1101–1105 (2000).
[Crossref]

D. Schneider, T. Witke, T. Schwarz, B. Schoneich, and B. Schultrich, “Testing ultra-thin films by laser-acoustics,” Surf. Coat. Technol. 126(2-3), 136–141 (2000).
[Crossref]

M. Perner, S. Gresillon, J. März, G. Von Plessen, J. Feldmann, J. Porstendorfer, K. J. Berg, and G. Berg, “Observation of hot-electron pressure in the vibration dynamics of metal nanoparticles,” Phys. Rev. Lett. 85(4), 792–795 (2000).
[Crossref]

1999 (1)

T. F. Crimmins, A. A. Maznev, and K. A. Nelson, “Transient grating measurements of picosecond acoustic pulses in metal films,” Appl. Phys. Lett. 74(9), 1344–1346 (1999).
[Crossref]

1998 (1)

V. E. Gusev and O. B. Wright, “Ultrafast nonequilibrium dynamics of electrons in metals,” Phys. Rev. B 57(5), 2878–2888 (1998).
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1996 (1)

B. Perrin, B. Bonello, J. C. Jeannet, and E. Romatet, “Picosecond ultrasonics study of metallic multilayers,” Phys. B 219-220, 681–683 (1996).
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1995 (1)

J. Hrbek, D. G. van Campen, and I. J. Malik, “The early stages of ruthenium oxidation,” J. Vac. Sci. Technol., A 13(3), 1409–1412 (1995).
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1994 (2)

G. Tas and H. J. Maris, “Electron diffusion in metals studied by picosecond ultrasonics,” Phys. Rev. B 49(21), 15046–15054 (1994).
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C.-K. Sun, F. Vallée, L. H. Acioli, E. P. Ippen, and J. G. Fujimoto, “Femtosecond-tunable measurement of electron thermalization in gold,” Phys. Rev. B 50(20), 15337–15348 (1994).
[Crossref]

1992 (2)

V. E. Gusev, “On the duration of acoustic pulses excited by subpicosecond laser action on metals,” Opt. Commun. 94(1-3), 76–78 (1992).
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O. B. Wright and K. Kawashima, “Coherent phonon detection from ultrafast surface vibrations,” Phys. Rev. Lett. 69(11), 1668–1671 (1992).
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1988 (1)

H. T. Grahn, H. J. Maris, and J. Tauc, “Time-resolved study of vibrations of a-Ge:H/a-Si:H multilayers,” Phys. Rev. B 38(9), 6066–6074 (1988).
[Crossref]

1986 (1)

C. Thomsen, H. T. Grahn, H. J. Maris, and J. Tauc, “Surface generation and detection of phonons by picosecond light pulses,” Phys. Rev. B 34(6), 4129–4138 (1986).
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1974 (1)

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel’man, “Electron emission from metal surfaces exposed to ultrashort laser pulses,” J. Exp. Theor. Phys. 39, 375–377 (1974).

1972 (1)

K. Uozumi, T. Nakada, and A. Kinbara, “Sound velocity and internal friction in vacuum deposited gold films,” Thin Solid Films 12(1), 67–70 (1972).
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1884 (1)

J. H. Poynting, “On the transfer of energy in the electromagnetic field,” Philos. Trans. R. Soc. London 175, 343–361 (1884).
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Acioli, L. H.

C.-K. Sun, F. Vallée, L. H. Acioli, E. P. Ippen, and J. G. Fujimoto, “Femtosecond-tunable measurement of electron thermalization in gold,” Phys. Rev. B 50(20), 15337–15348 (1994).
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Adam, A. J. L.

Alameda, J.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
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S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750 (2003).
[Crossref]

Anisimov, S. I.

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel’man, “Electron emission from metal surfaces exposed to ultrashort laser pulses,” J. Exp. Theor. Phys. 39, 375–377 (1974).

Antoncecchi, A.

H. Zhang, A. Antoncecchi, S. Edward, P. Planken, and S. Witte, “Ultrafast laser-induced guided elastic waves in a freestanding aluminum membrane,” Phys. Rev. B 103(6), 064303 (2021).
[Crossref]

H. Zhang, A. Antoncecchi, S. Edward, I. Setija, P. Planken, and S. Witte, “Unravelling phononic, opto-acoustic and mechanical properties of metals with light-driven hypersound,” Phys. Rev. Appl. 10, 1–12 (2020).
[Crossref]

S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte, and P. C. M. Planken, “Detection of Hidden Gratings through Multilayer Nanostructures Using Light and Sound,” Phys. Rev. Appl. 14(1), 014015 (2020).
[Crossref]

V. Verrina, S. Edward, H. Zhang, A. Antoncecchi, S. Witte, and P. C. M. Planken, “Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures,” Appl. Opt. 59(30), 9499 (2020).
[Crossref]

A. Antoncecchi, H. Zhang, S. Edward, V. Verrina, P. C. M. Planken, and S. Witte, “High-resolution microscopy through optically opaque media using ultrafast photoacoustics,” Opt. Express 28(23), 33937 (2020).
[Crossref]

S. Edward, A. Antoncecchi, H. Zhang, H. Sielcken, S. Witte, and P. C. M. Planken, “Detection of periodic structures through opaque metal layers by optical measurements of ultrafast electron dynamics,” Opt. Express 26(18), 23380–23396 (2018).
[Crossref]

Antonelli, G. A.

J. L. Arlein, S. E. Palaich, B. C. Daly, P. Subramonium, and G. A. Antonelli, “Optical pump-probe measurements of sound velocity and thermal conductivity of hydrogenated amorphous carbon films,” J. Appl. Phys. 104(3), 033508 (2008).
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G. A. Antonelli, P. Zannitto, and H. J. Maris, “New method for the generation of surface acoustic waves of high frequency,” Phys. B 316-317, 377–379 (2002).
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Aoki, T.

H. Takase, S. Terashima, Y. Gomei, M. Tanabe, Y. Watanabe, T. Aoki, K. Murakami, S. Matsunari, M. Niibe, and Y. Kakutani, “Study of ruthenium-capped multilayer mirror for EUV irradiation durability,” Emerg. Lithogr. Technol. 6151, 615135 (2006).
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Aquila, A.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750 (2003).
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Arlein, J. L.

J. L. Arlein, S. E. Palaich, B. C. Daly, P. Subramonium, and G. A. Antonelli, “Optical pump-probe measurements of sound velocity and thermal conductivity of hydrogenated amorphous carbon films,” J. Appl. Phys. 104(3), 033508 (2008).
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Armstrong, M. R.

M. R. Armstrong, E. J. Reed, K. Y. Kim, J. H. Glownia, W. M. Howard, E. L. Piner, and J. C. Roberts, “Observation of terahertz radiation coherently generated by acoustic waves,” Nat. Phys. 5(4), 285–288 (2009).
[Crossref]

Audouard, E.

J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, “Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals,” J. Appl. Phys. 111(2), 024902 (2012).
[Crossref]

Bajt, S.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750 (2003).
[Crossref]

Baker, S.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

Baracu, A.

C. Birleanu, M. Pustan, V. Merie, R. Müller, R. Voicu, A. Baracu, and S. Craciun, “Temperature effect on the mechanical properties of gold nano films with different thickness,” IOP Conf. Ser. Mater. Sci. Eng. 147, 012021 (2016).
[Crossref]

Berg, G.

M. Perner, S. Gresillon, J. März, G. Von Plessen, J. Feldmann, J. Porstendorfer, K. J. Berg, and G. Berg, “Observation of hot-electron pressure in the vibration dynamics of metal nanoparticles,” Phys. Rev. Lett. 85(4), 792–795 (2000).
[Crossref]

Berg, K. J.

M. Perner, S. Gresillon, J. März, G. Von Plessen, J. Feldmann, J. Porstendorfer, K. J. Berg, and G. Berg, “Observation of hot-electron pressure in the vibration dynamics of metal nanoparticles,” Phys. Rev. Lett. 85(4), 792–795 (2000).
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Bijkerk, F.

I. Milov, I. A. Makhotkin, R. Sobierajski, N. Medvedev, V. Lipp, J. Chalupský, J. M. Sturm, K. Tiedtke, G. de Vries, M. Störmer, F. Siewert, R. van de Kruijs, E. Louis, I. Jacyna, M. Jurek, L. Juha, V. Hájková, V. Vozda, T. Burian, K. Saksl, B. Faatz, B. Keitel, E. Plönjes, S. Schreiber, S. Toleikis, R. Loch, M. Hermann, S. Strobel, H.-K. Nienhuys, G. Gwalt, T. Mey, H. Enkisch, and F. Bijkerk, “Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser,” Opt. Express 26(15), 19665 (2018).
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P. J. van Zwol, D. F. Vles, W. P. Voorthuijzen, M. Péter, H. Vermeulen, W. J. van der Zande, J. M. Sturm, R. W. van de Kruijs, and F. Bijkerk, “Emissivity of freestanding membranes with thin metal coatings,” J. Appl. Phys. 118(21), 213107 (2015).
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I. Nedelcu, R. W. Van De Kruijs, A. E. Yakshin, and F. Bijkerk, “Temperature-dependent nanocrystal formation in Mo Si multilayers,” Phys. Rev. B 76(24), 245404 (2007).
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Birleanu, C.

C. Birleanu, M. Pustan, V. Merie, R. Müller, R. Voicu, A. Baracu, and S. Craciun, “Temperature effect on the mechanical properties of gold nano films with different thickness,” IOP Conf. Ser. Mater. Sci. Eng. 147, 012021 (2016).
[Crossref]

Bonello, B.

B. Perrin, B. Bonello, J. C. Jeannet, and E. Romatet, “Picosecond ultrasonics study of metallic multilayers,” Phys. B 219-220, 681–683 (1996).
[Crossref]

Bonn, M.

M. Bonn, D. N. Denzler, S. Funk, M. Wolf, S. S. Wellershoff, and J. Hohlfeld, “Ultrafast electron dynamics at metal surfaces: Competition between electron-phonon coupling and hot-electron transport,” Phys. Rev. B 61(2), 1101–1105 (2000).
[Crossref]

Bounhalli, M.

J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, “Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals,” J. Appl. Phys. 111(2), 024902 (2012).
[Crossref]

Bower, J. E.

B. C. Daly, N. C. Holme, T. Buma, C. Branciard, T. B. Norris, D. M. Tennant, J. A. Taylor, J. E. Bower, and S. Pau, “Imaging nanostructures with coherent phonon pulses,” Appl. Phys. Lett. 84(25), 5180–5182 (2004).
[Crossref]

Branciard, C.

B. C. Daly, N. C. Holme, T. Buma, C. Branciard, T. B. Norris, D. M. Tennant, J. A. Taylor, J. E. Bower, and S. Pau, “Imaging nanostructures with coherent phonon pulses,” Appl. Phys. Lett. 84(25), 5180–5182 (2004).
[Crossref]

Braun, S.

A. Haase, V. Soltwisch, F. Scholze, and S. Braun, “Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering,” Proc. SPIE 9628, 962804 (2015).
[Crossref]

Buma, T.

B. C. Daly, N. C. Holme, T. Buma, C. Branciard, T. B. Norris, D. M. Tennant, J. A. Taylor, J. E. Bower, and S. Pau, “Imaging nanostructures with coherent phonon pulses,” Appl. Phys. Lett. 84(25), 5180–5182 (2004).
[Crossref]

Burian, T.

Caruyer, G.

A. Devos, R. Cote, G. Caruyer, and A. Lefvre, “A different way of performing picosecond ultrasonic measurements in thin transparent films based on laser-wavelength effects,” Appl. Phys. Lett. 86(21), 211903 (2005).
[Crossref]

Chalupský, J.

Chapman, H. N.

Chou, K. Y.

K. Y. Chou, C. L. Wu, C. C. Shen, J. K. Sheu, and C. K. Sun, “Terahertz Photoacoustic Generation Using Ultrathin Nickel Nanofilms,” J. Phys. Chem. C 125(5), 3134–3142 (2021).
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P. J. Wang, C. C. Shen, K. Y. Chou, M. H. Ho, J. K. Sheu, and C. K. Sun, “Studying time-dependent contribution of hot-electron versus lattice-induced thermal-expansion response in ultra-Thin Au-nanofilms,” Appl. Phys. Lett. 117(15), 154101 (2020).
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Clift, M.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

Colombier, J. P.

J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, “Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals,” J. Appl. Phys. 111(2), 024902 (2012).
[Crossref]

Cote, R.

A. Devos, R. Cote, G. Caruyer, and A. Lefvre, “A different way of performing picosecond ultrasonic measurements in thin transparent films based on laser-wavelength effects,” Appl. Phys. Lett. 86(21), 211903 (2005).
[Crossref]

A. Devos and R. Cote, “Strong oscillations detected by picosecond ultrasonics in silicon: Evidence for an electronic-structure effect,” Phys. Rev. B 70(12), 125208 (2004).
[Crossref]

Craciun, S.

C. Birleanu, M. Pustan, V. Merie, R. Müller, R. Voicu, A. Baracu, and S. Craciun, “Temperature effect on the mechanical properties of gold nano films with different thickness,” IOP Conf. Ser. Mater. Sci. Eng. 147, 012021 (2016).
[Crossref]

Crimmins, T. F.

T. F. Crimmins, A. A. Maznev, and K. A. Nelson, “Transient grating measurements of picosecond acoustic pulses in metal films,” Appl. Phys. Lett. 74(9), 1344–1346 (1999).
[Crossref]

Dai, Z. R.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

Daly, B. C.

J. L. Arlein, S. E. Palaich, B. C. Daly, P. Subramonium, and G. A. Antonelli, “Optical pump-probe measurements of sound velocity and thermal conductivity of hydrogenated amorphous carbon films,” J. Appl. Phys. 104(3), 033508 (2008).
[Crossref]

B. C. Daly, N. C. Holme, T. Buma, C. Branciard, T. B. Norris, D. M. Tennant, J. A. Taylor, J. E. Bower, and S. Pau, “Imaging nanostructures with coherent phonon pulses,” Appl. Phys. Lett. 84(25), 5180–5182 (2004).
[Crossref]

de Haan, G.

de Vries, G.

Denzler, D. N.

M. Bonn, D. N. Denzler, S. Funk, M. Wolf, S. S. Wellershoff, and J. Hohlfeld, “Ultrafast electron dynamics at metal surfaces: Competition between electron-phonon coupling and hot-electron transport,” Phys. Rev. B 61(2), 1101–1105 (2000).
[Crossref]

Devos, A.

A. Devos, R. Cote, G. Caruyer, and A. Lefvre, “A different way of performing picosecond ultrasonic measurements in thin transparent films based on laser-wavelength effects,” Appl. Phys. Lett. 86(21), 211903 (2005).
[Crossref]

A. Devos and R. Cote, “Strong oscillations detected by picosecond ultrasonics in silicon: Evidence for an electronic-structure effect,” Phys. Rev. B 70(12), 125208 (2004).
[Crossref]

A. Devos and A. Le Louarn, “Strong effect of interband transitions in the picosecond ultrasonics response of metallic thin films,” Phys. Rev. B 68(4), 045405 (2003).
[Crossref]

A. Devos and C. Lerouge, “Evidence of laser-wavelength effect in picosecond ultrasonics: Possible connection with interband transitions,” Phys. Rev. Lett. 86(12), 2669–2672 (2001).
[Crossref]

Edward, S.

H. Zhang, A. Antoncecchi, S. Edward, P. Planken, and S. Witte, “Ultrafast laser-induced guided elastic waves in a freestanding aluminum membrane,” Phys. Rev. B 103(6), 064303 (2021).
[Crossref]

A. Antoncecchi, H. Zhang, S. Edward, V. Verrina, P. C. M. Planken, and S. Witte, “High-resolution microscopy through optically opaque media using ultrafast photoacoustics,” Opt. Express 28(23), 33937 (2020).
[Crossref]

V. Verrina, S. Edward, H. Zhang, A. Antoncecchi, S. Witte, and P. C. M. Planken, “Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures,” Appl. Opt. 59(30), 9499 (2020).
[Crossref]

S. Edward, H. Zhang, S. Witte, and P. C. M. Planken, “Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness,” Opt. Express 28(16), 23374 (2020).
[Crossref]

V. Verrina, S. Edward, H. Zhang, S. Witte, and P. C. M. Planken, “Photoacoustic detection of low duty cycle gratings through optically opaque layers,” Appl. Phys. Lett. 117(5), 051104 (2020).
[Crossref]

S. Edward, H. Zhang, I. Setija, V. Verrina, A. Antoncecchi, S. Witte, and P. C. M. Planken, “Detection of Hidden Gratings through Multilayer Nanostructures Using Light and Sound,” Phys. Rev. Appl. 14(1), 014015 (2020).
[Crossref]

H. Zhang, A. Antoncecchi, S. Edward, I. Setija, P. Planken, and S. Witte, “Unravelling phononic, opto-acoustic and mechanical properties of metals with light-driven hypersound,” Phys. Rev. Appl. 10, 1–12 (2020).
[Crossref]

S. Edward, A. Antoncecchi, H. Zhang, H. Sielcken, S. Witte, and P. C. M. Planken, “Detection of periodic structures through opaque metal layers by optical measurements of ultrafast electron dynamics,” Opt. Express 26(18), 23380–23396 (2018).
[Crossref]

Edwards, N. V. G.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

Eichler, H. J.

H. J. Eichler, P. Günter, and D. W. Pohl, Laser-Induced Dynamic Gratings, vol. 50 of Springer Series in Optical Sciences (Springer Berlin Heidelberg, Berlin, Heidelberg, 1986).

Enkisch, H.

Faatz, B.

Faure, N.

J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, “Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals,” J. Appl. Phys. 111(2), 024902 (2012).
[Crossref]

Feldmann, J.

M. Perner, S. Gresillon, J. März, G. Von Plessen, J. Feldmann, J. Porstendorfer, K. J. Berg, and G. Berg, “Observation of hot-electron pressure in the vibration dynamics of metal nanoparticles,” Phys. Rev. Lett. 85(4), 792–795 (2000).
[Crossref]

Feurer, T.

R. I. Tobey, E. H. Gershgoren, M. E. Siemens, M. M. Murnane, H. C. Kapteyn, T. Feurer, and K. A. Nelson, “Nanoscale photothermal and photoacoustic transients probed with extreme ultraviolet radiation,” Appl. Phys. Lett. 85(4), 564–566 (2004).
[Crossref]

Fujimoto, J. G.

C.-K. Sun, F. Vallée, L. H. Acioli, E. P. Ippen, and J. G. Fujimoto, “Femtosecond-tunable measurement of electron thermalization in gold,” Phys. Rev. B 50(20), 15337–15348 (1994).
[Crossref]

Funk, S.

M. Bonn, D. N. Denzler, S. Funk, M. Wolf, S. S. Wellershoff, and J. Hohlfeld, “Ultrafast electron dynamics at metal surfaces: Competition between electron-phonon coupling and hot-electron transport,” Phys. Rev. B 61(2), 1101–1105 (2000).
[Crossref]

Garrelie, F.

J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, “Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals,” J. Appl. Phys. 111(2), 024902 (2012).
[Crossref]

Gershgoren, E. H.

R. I. Tobey, E. H. Gershgoren, M. E. Siemens, M. M. Murnane, H. C. Kapteyn, T. Feurer, and K. A. Nelson, “Nanoscale photothermal and photoacoustic transients probed with extreme ultraviolet radiation,” Appl. Phys. Lett. 85(4), 564–566 (2004).
[Crossref]

Glownia, J. H.

M. R. Armstrong, E. J. Reed, K. Y. Kim, J. H. Glownia, W. M. Howard, E. L. Piner, and J. C. Roberts, “Observation of terahertz radiation coherently generated by acoustic waves,” Nat. Phys. 5(4), 285–288 (2009).
[Crossref]

Gomei, Y.

H. Takase, S. Terashima, Y. Gomei, M. Tanabe, Y. Watanabe, T. Aoki, K. Murakami, S. Matsunari, M. Niibe, and Y. Kakutani, “Study of ruthenium-capped multilayer mirror for EUV irradiation durability,” Emerg. Lithogr. Technol. 6151, 615135 (2006).
[Crossref]

Grahn, H. T.

H. T. Grahn, H. J. Maris, and J. Tauc, “Time-resolved study of vibrations of a-Ge:H/a-Si:H multilayers,” Phys. Rev. B 38(9), 6066–6074 (1988).
[Crossref]

C. Thomsen, H. T. Grahn, H. J. Maris, and J. Tauc, “Surface generation and detection of phonons by picosecond light pulses,” Phys. Rev. B 34(6), 4129–4138 (1986).
[Crossref]

Grantham, S.

Gresillon, S.

M. Perner, S. Gresillon, J. März, G. Von Plessen, J. Feldmann, J. Porstendorfer, K. J. Berg, and G. Berg, “Observation of hot-electron pressure in the vibration dynamics of metal nanoparticles,” Phys. Rev. Lett. 85(4), 792–795 (2000).
[Crossref]

Gullikson, E.

Gullikson, E. M.

S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Emerg. Lithogr. Technol. IX 5751, 118 (2005).
[Crossref]

Günter, P.

H. J. Eichler, P. Günter, and D. W. Pohl, Laser-Induced Dynamic Gratings, vol. 50 of Springer Series in Optical Sciences (Springer Berlin Heidelberg, Berlin, Heidelberg, 1986).

Guo, C.

J. Wang and C. Guo, “Effect of electron heating on femtosecond laser-induced coherent acoustic phonons in noble metals,” Phys. Rev. B 75(18), 184304 (2007).
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Gusev, V. E.

P. Ruello and V. E. Gusev, “Physical mechanisms of coherent acoustic phonons generation by ultrafast laser action,” Ultrasonics 56, 21–35 (2015).
[Crossref]

V. E. Gusev and O. B. Wright, “Ultrafast nonequilibrium dynamics of electrons in metals,” Phys. Rev. B 57(5), 2878–2888 (1998).
[Crossref]

V. E. Gusev, “On the duration of acoustic pulses excited by subpicosecond laser action on metals,” Opt. Commun. 94(1-3), 76–78 (1992).
[Crossref]

Gwalt, G.

Haase, A.

A. Haase, V. Soltwisch, F. Scholze, and S. Braun, “Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering,” Proc. SPIE 9628, 962804 (2015).
[Crossref]

Hájková, V.

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Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Figures (11)
Fig. 1.
Fig. 1. Schematic drawing of the setup used in our experiments. The output of a 1 kHz repetition rate regenerative amplified Ti:Sapphire laser is split into a pump beam and a probe beam. The pump first travels through an optical delay line after which the optical frequency is doubled using a BBO crystal. Afterward, the pump is optically chopped to reduce the repetition rate by 50%. The pump is split into two beams. These two pump beams overlap in time and, noncollinearly, in space to form an intensity grating on the Ru surface. The probe is sent to an optical parametric amplifier (OPA) set to generate a signal beam with a wavelength of 1300 nm. This beam is subsequently frequency-doubled to create a beam with a central wavelength of 650 nm. Afterward, the probe beam is focused onto the sample in the same spot as the pump pair.

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Fig. 2.
Fig. 2. AFM images of three Ru layers on glass with thicknesses of 20 nm (a), 5.0 nm (b), and 2.3 nm (c). The RMS surface roughness for these thicknesses is 520 pm, 580 pm, and 460 pm, respectively.

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Fig. 3.
Fig. 3. Transient-grating pump-induced diffraction efficiency of the 650 nm central wavelength probe beam on a 107 nm Ru layer deposited on glass, as a function of time. The black dashed line is a calculation of the diffraction efficiency induced by a combination of the strain- and thermo-optic effect. This calculation does not include damping of the acoustic wave or partial transmission of the wave into the glass substrate.

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Fig. 4.
Fig. 4. Calculated diffraction efficiency of only the strain-optic, only the thermo-optic and only the displacement effects. All contributions have been normalized to their respective maximum.

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Fig. 5.
Fig. 5. Transient-grating pump-induced changes to the diffraction efficiency. (a) The measured diffraction efficiency for 20 nm and 5 nm thick Ru layers on a long timescale. (b) The measured diffraction for multiple layer thicknesses, here the curves have been normalized to their respective electronic peaks and have been given an offset for clarity.

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Fig. 6.
Fig. 6. (a) Measured diffraction efficiency of multiple layer thicknesses, also shown in Fig. 5(b) but with the thermal background removed. The dashed lines correspond to a fit of a single-frequency, damped sine to the data. (b) The speed of sound extracted from the fit as a function of layer thickness.

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Fig. 7.
Fig. 7. The red dots show the damping rate versus the frequency of the acoustic wave. The blue dot corresponds to the damping rate acquired for the 1.2 nm thick Ru layer, for which an accurate oscillation frequency could not be determined. The yellow crosses represent the calculated damping rate caused by interface roughness and the dashed line going through the crosses acts as a guide to the eye. The blue triangles represent the calculated damping rate caused by transmission of acoustic energy into the substrate, and again, the dashed line going through the triangles acts as a guide to the eye.

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Fig. 8.
Fig. 8. Measured pump-power dependence of the diffraction for a 5 nm (a) Ru layer and a 2.3 nm (b) Ru layer. The black dashed lines are single frequency dampened sinusoidal fits to the data, starting from the dashed vertical red line and extrapolated backwards to t = 0.

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Fig. 9.
Fig. 9. The starting phase and the frequency of the generated acoustic wave, extracted from the fits shown in Fig. 8(a) and (b). Note that for both thicknesses the frequency and phase remain almost constant as a function of pump pulse energy and that the phase equals -$\pi /2$ for all pump powers.

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Fig. 10.
Fig. 10. The different steps undertaken to remove the slowly decaying thermal background from the measured signal on the 3.3 nm thick Ru layer. In green, we show the nearest neighbor average of the normalized acoustic-wave-induced diffracted probe signal as a function of pump-probe delay. The red curve shows the exponential fit to the data truncated at the time t = 0.7 ps, indicated by the vertical dashed line. After subtraction of the exponential fit, we end up with the acoustic signal shown in yellow.

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Fig. 11.
Fig. 11. Electron (a) and lattice (b) temperature as a function of time in the center of a 5 nm thick Ru layer in a bright fringe of the transient grating. The legend shows the total energy of the two incident pump beams which form the transient grating.

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Tables (2)

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Table 1. Calculated acoustic impedance of Ru at the different measured acoustic frequencies.

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Table 2. ruthenium material parameters used in the TTM calculations, taken from Ref. [28].

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Equations (10)

Equations on this page are rendered with MathJax. Learn more.

C e ( T e ) ∂ T e ∂ t = ∂ ∂ z ( k e ( T e , T l ) ∂ T e ∂ z ) − g ( T e − T l ) + S ( z , t ) , C l ∂ T l ∂ t = g ( T e − T l ) ,
σ z t h ( z , t ) = − 3 B β Δ T l ( z , t ) ,
s z ( z , t ) = ∂ u ( z , t ) ∂ z , σ z ( z , t ) = σ s t r + σ z t h = ( λ + 2 μ ) s z ( z , t ) − 3 B β Δ T l ( z , t ) , ρ ∂ 2 u ( z , t ) ∂ t 2 = ∂ σ z ( z , t ) ∂ z ,
η d i s p = | i r k z h 0 ( t ) | 2 ∝ | k z ∫ 0 L s z ( z , t )   d z | 2 ,
η s t r = | δ r s t r | 2 ∝ | k s t r ∫ 0 L exp ⁡ ( 2 i k z n z − 2 z d p ) s ( z , t )   d z | 2 ,
η t h = | δ r t h | 2 ∝ | k t h ∫ 0 L exp ⁡ ( 2 i k z n z − 2 z d p ) Δ T ( z , t )   d z | 2 ,
η t o t ∝ | i r k z h 0 ( t ) + δ r s t r + δ r t h | 2 ,
R ( f ) = ( Z R u ( f ) − Z s u b Z R u ( f ) + Z s u b ) 2 ,
σ e = γ e Δ E e ,
f ( t ) = a e b ( t − c ) + d ,

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