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A high aspect-ratio holey metalens

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Abstract

We design and fabricate metalenses comprising substrateless ultra-deep via-holes in silicon with aspect ratios exceeding 30:1. Deep holes allow us to circumvent fabrication and fragility constraints which limit the aspect ratios of free-standing meta-atoms.

© 2021 The Author(s)

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More Like This
High-Aspect-Ratio Free-Standing Membrane Waveguides for Mid-Infrared Nanophotonics

Marek Vlk, Anurup Datta, Sebastian Alberti, Astrid Aksnes, Ganapathy Senthil Murugan, and Jana Jágerská
STu1A.2 CLEO: Science and Innovations (CLEO_SI) 2021

Fabrication of High Aspect Ratio Optical Light Pipes

Winnie N. Ye, Peter Duane, Munib Wober, and Kenneth B. Crozier
FTuV2 Frontiers in Optics (FiO) 2009

High Aspect ratio metamaterials for enhanced tunability and sensitivity

Sher-Yi Chiam, Mohammed Bahou, Herbert O Moser, Jianqiang Gu, Ranjan Singh, Weili Zhang, Jiaguang Han, and Andrew A. Bettiol
JWA114 Conference on Lasers and Electro-Optics (CLEO) 2009

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