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Conferences > IPRSN > 2018 > ITh1I > ITh1I.1

Monolithic Integration of Al2O3 and Si3N4 for Double-layer Integrated Photonic Chips

Jinfeng Mu, Michiel de Goede, Meindert Dijkstra, and Sonia M. García-Blanco

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Abstract

Optical coupling for monolithic integration of Al2O3 and Si3N4 layers is presented using a vertical and lateral adiabatic taper. The measured loss of the fabricated couplers is 0.49±0.03 dB at the wavelength of 1030 nm.

© 2018 The Author(s)

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