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Monolithic Integration of Al2O3 and Si3N4 for Double-layer Integrated Photonic Chips

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Optical coupling for monolithic integration of Al2O3 and Si3N4 layers is presented using a vertical and lateral adiabatic taper. The measured loss of the fabricated couplers is 0.49±0.03 dB at the wavelength of 1030 nm.

© 2018 The Author(s)

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