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Tri-layer, Vertical Y-junction, Si3N4/SiO2 3D Photonic Integrated Circuits with Arbitrary Splitting Ratio

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Abstract

We design Si3N4 tri-layer vertical Y-junction with arbitrary splitting ratio and low reflection, fabricate bi-layer asymmetric vertical coupler, and demonstrate tri-layer vertical Y-junction with splitting ratio of 1:1 and 3:2 for multilayer photonic integrated circuits.

© 2016 Optical Society of America

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