Abstract
The advances in the optoelectronic market for SSL constantly demand a reduction of the production cost of devices. The Cost of Ownership of the MOCVD production tool is one of the key parameters. We addressed this issue by developing two new reactor configurations for the AIX2800G4 HT Planetary Reactor® (11×4 inch) and CRIUS® Close-Coupled-Showerhead (CCS) (12×3 inch) platforms.
© 2008 Optical Society of America
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