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Conferences > OIC > 2022 > ThC > ThC.1

State of the Art of PVD Coating Equipment for Mass Production in Asia

Bin Fan

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Abstract

State of the art of PVD coating equipment for mass production in Asia were described in this paper. Evaporation, ion assisted deposition, ion beam sputtering, magnetron sputtering and atomic layer deposition coating tools were introduced based on different application and market segments.

© 2022 The Author(s)

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