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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CTHB1

Development of high average power high repetition rate excimer lasers

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Abstract

High repetition, rate operations are required using practical discharge excited excimer lasers in material processing. The reason is that high repetition rate operations improve productivity (large throughput) and allow great controllability by controlling the irradiation shot number.

© 1990 Optical Society of America

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