Abstract

Micro-Fresnel lenses are important optical components for micro-optics. They can be made by thin films and can achieve small focal lengths, making them attractive for integration with other optical devices. Both blazed and binary Fresnel microlenses have been studied and fabricated^1,2; however, most of those lenses lie on the surface of the substrate and are difficult to integrate with optoelectronic components. In this paper, we report a three-dimensional binary phase micro-Fresnel lens which stands perpendicular to the substrate. Together with the beam splitters fabricated by similar method, we can build a “micro-optical table” on a wafer, and use it to link optoelectronic devices such as semiconductor lasers, isolators, optical fibers, and photodetectors.

© 1994 Optical Society of America