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Conferences > CLEO > 1997 > CTuP > CTuP45
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper CTuP45

On-wafer dual-beam electro-optic probing of electric-field vector

W. K. Kuo, S. L. Huang, and L. C. Chang

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Abstract

Wafer-level optoelectronic probing on semiconductor devices and circuits have proved to bean effective tool to extract the device/circuit parameters, such as response time, delay time, scattering parameters, etc.1,2

© 1997 Optical Society of America

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