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Conferences > CLEO > 2008 > CThKK > CThKK4
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CThKK4

AlGaN/GaN Multiple Quantum Wells Grown By Atomic Layer Deposition

M. H. Lo, S.W. Chen, Z.Y. Li., T. C. Lu, H. C. Kuo, and S. C. Wang

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Abstract

Three-pair AlGaN/GaN multiple quantum well structure with superlattice was grown using metal-organic chemical vapor deposition system. The AlGaN barrier and GaN well of the MQW were grown by atmoic layer deposition and conventional growth, respectively.

© 2008 Optical Society of America

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